Excimer Lasers Support Industrial Micromachining Diversity
نویسندگان
چکیده
منابع مشابه
Excimer laser microfabrication and micromachining
Excimer lasers are proving to be highly successful for fabricating industrial components with feature sizes in the range between 0.05–1,000μm (see Fig. 1). As well as providing a 15 year, 5 generation extension to optical lithography as used in the manufacture of silicon chips, excimer lasers are used for microfabricating many of the critical features in a wide variety of the electronic and tel...
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The recent trend in microelectronics towards patterning critical feature sizes of 0.25 m and below has motivated the development of microlithography at the deep ultra-violet (DUV) laser wavelengths of 248 and 1 93 nm. In recent years the performance, reliability, and cost of ownership of excimer light sources have improved. Some key technologies needed for excimer lasers in microlithography inc...
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The first commercial excimer laser was introduced 40 years ago by Lambda Physik (now Coherent; Santa Clara, CA). Interestingly, its developers— Bernd Steyer and Dirk Basting—were both chemists whose main goal was to develop a light source for photochemistry and dye laser pumping. As soon as excimer lasers entered the market, Lambda Physik began to investigate other possible uses for a powerful ...
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ژورنال
عنوان ژورنال: Laser Technik Journal
سال: 2007
ISSN: 1613-7728,1863-9119
DOI: 10.1002/latj.200790141